[Staff] Seminar Speaker today: Dr. Weinstein, MIT - videoconferenced from UW
Theresa Garcia
tgarcia at mail.sdsu.edu
Mon Feb 13 08:04:46 PST 2012
Please remind colleagues and students for today 2/13/12:
Center for Sensorimotor Neural Engineering
PRESENTS
"Active RF and mm-Wave MEMS Resonators
Using Transistor Sensing"
Dana Weinstein, PhD
Finn Assistant Professor
Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Dr. Weinstein will discuss the Resonant Body Transistor (RBT), which can be
integrated into a standard CMOS process for low power clock generation and
high-Q tank circuits. We recently demonstrated the first hybrid RF MEMS-CMOS
resonators in Si at the transistor level of IBM's 32nm SOI CMOS process,
without the need for any post-processing or packaging. The unreleased, Si
bulk acoustic resonators are driven capacitively using the thin gate
dielectric, and actively sensed using a body-contacted nFET incorporated
into the resonant cavity. FET sensing with the high fT, high performance
transistors in CMOS amplifies the mechanical signal before the presence of
parasitics. The resulting RF-MEMS resonators provide low power, low cost,
small footprint building blocks for on-chip signal generation and
processing.
Figure 1. (left) Schematic of CMOS-integrated Resonant Body Transistor
(RBT). (right) Cross section of CMOS stack showing RBT in the Si device
layer. The device resonates at 11 GHz with no post-processing or packaging
of the CMOS chip.
Monday, February 13, 2012
3:30 PM - 4:30 PM
SDSU will connect via videoconference from SDSU, room E203e
Space is limited, please arrive early; contact Theresa Garcia,
<mailto:tgarcia at mail.sdsu.edu> tgarcia at mail.sdsu.edu for questions
Theresa M. Garcia, M.A.Ed.
'91 & '09
MEP Director
SDSU College of Engineering
5500 Campanile Drive
San Diego, CA 92182-1303
619 594-5679 (voice)
619 594-2108 (fax)
"Here is a test to find whether your mission on earth is finished : If
you're alive, it isn't." ― Illusions, Richard Bach
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