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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='font-family:"Verdana","sans-serif"'>Please remind colleagues and students for today 2/13/12:<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Verdana","sans-serif"'><o:p> </o:p></span></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:24.0pt'>Center fo</span></b><b><span style='font-size:24.0pt'>r Sensorimotor Neural Engineering</span></b><b><span style='font-size:10.0pt'><o:p></o:p></span></b></p><p class=MsoNormal align=center style='text-align:center'><span style='font-size:3.0pt'><o:p> </o:p></span></p><p class=MsoNormal align=center style='text-align:center'><b><i><span style='font-size:16.0pt'>PRESENTS</span></i></b><b><i><span style='font-size:10.0pt'><o:p></o:p></span></i></b></p><p class=MsoNormal align=center style='text-align:center'><strong><u><span style='font-size:6.0pt;font-family:"Arial","sans-serif";color:black'><o:p><span style='text-decoration:none'> </span></o:p></span></u></strong></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:22.0pt'>“Active RF and mm-Wave MEMS Resonators </span></b><span style='font-size:22.0pt'><o:p></o:p></span></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:22.0pt'>Using Transistor Sensing”<o:p></o:p></span></b></p><p class=MsoNormal style='text-autospace:none'><o:p> </o:p></p><p class=MsoNormal align=center style='text-align:center;text-autospace:none'><b><span style='font-size:22.0pt'>Dana Weinstein, PhD<o:p></o:p></span></b></p><p class=MsoNormal align=center style='text-align:center;text-autospace:none'><span style='font-size:18.0pt'>Finn Assistant Professor<o:p></o:p></span></p><p class=MsoNormal align=center style='text-align:center;text-autospace:none'><span style='font-size:18.0pt'>Electrical Engineering and Computer Science<o:p></o:p></span></p><p class=MsoNormal align=center style='text-align:center;text-autospace:none'><span style='font-size:18.0pt'>Massachusetts Institute of Technology</span><span style='font-size:10.0pt'><br><br></span><i><span style='font-size:10.0pt'><o:p></o:p></span></i></p><p class=default style='margin:0in;margin-bottom:.0001pt;text-align:justify'><span style='font-family:"Arial","sans-serif"'>Dr. Weinstein will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process for low power clock generation and high-Q tank circuits. We recently demonstrated the first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s 32nm SOI CMOS process, without the need for any post-processing or packaging. The unreleased, Si bulk acoustic resonators are driven capacitively using the thin gate dielectric, and actively sensed using a body-contacted nFET incorporated into the resonant cavity. FET sensing with the high <i>f</i><sub>T</sub>, high performance transistors in CMOS amplifies the mechanical signal before the presence of parasitics. The resulting RF-MEMS resonators provide low power, low cost, small footprint building blocks for on-chip signal generation and processing. <o:p></o:p></span></p><p class=default style='margin:0in;margin-bottom:.0001pt;text-align:justify'><span style='font-family:"Arial","sans-serif"'><o:p> </o:p></span></p><p class=default style='margin:0in;margin-bottom:.0001pt;text-align:justify'><!--[if gte vml 1]><v:group id="Group_x0020_5" o:spid="_x0000_s1026" style='position:absolute;left:0;text-align:left;margin-left:29.95pt;margin-top:11.05pt;width:478pt;height:115.5pt;z-index:251658240' coordsize="60711,14672" o:gfxdata="UEsDBBQABgAIAAAAIQCKFT+YDAEAABUCAAATAAAAW0NvbnRlbnRfVHlwZXNdLnhtbJSRwU7DMAyG

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</v:group><![endif]--><![if !vml]><img width=637 height=154 src="cid:image003.png@01CCEA26.1F28B4C0" align=left v:shapes="Group_x0020_5 Picture_x0020_3 Picture_x0020_4"><![endif]><span style='font-family:"Arial","sans-serif"'><o:p></o:p></span></p><p class=default align=center style='mso-margin-top-alt:3.0pt;margin-right:0in;margin-bottom:3.0pt;margin-left:0in;text-align:center;line-height:115%'><b><span style='font-size:14.0pt;line-height:115%'>�� <a name="_GoBack"></a><o:p></o:p></span></b></p><p class=MsoNoSpacing>Figure 1. (left) Schematic of CMOS-integrated Resonant Body Transistor (RBT). (right) Cross section of CMOS stack showing RBT in the Si device layer. The device resonates at 11 GHz with no post-processing or packaging of the CMOS chip.<span style='font-size:6.0pt'><o:p></o:p></span></p><p class=MsoNoSpacing align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'><o:p> </o:p></span></b></p><p class=MsoNoSpacing align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'><o:p> </o:p></span></b></p><p class=MsoNoSpacing align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'><o:p> </o:p></span></b></p><p class=MsoNoSpacing align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'><o:p> </o:p></span></b></p><p class=MsoNoSpacing align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'>Monday, February 13, 2012<o:p></o:p></span></b></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:16.0pt;font-family:"Century Gothic","sans-serif"'>3:30 PM – 4:30 PM<o:p></o:p></span></b></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:14.0pt;color:black'>SDSU will connect via videoconference from SDSU, room E203e</span></b><b><span style='font-size:14.0pt;font-family:"Arial","sans-serif";color:black'><o:p></o:p></span></b></p><p class=MsoNormal align=center style='text-align:center'><b><span style='font-size:10.0pt;color:black'>Space is limited, please arrive early; contact Theresa Garcia, </span></b><a href="mailto:tgarcia@mail.sdsu.edu"><b><span style='font-size:10.0pt'>tgarcia@mail.sdsu.edu</span></b></a><b><span style='font-size:10.0pt;color:black'> for questions</span></b><b><span style='font-size:10.0pt;color:black'><o:p></o:p></span></b></p><p class=MsoNormal><span style='font-family:"Verdana","sans-serif"'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-family:"Verdana","sans-serif"'><o:p> </o:p></span></p><p class=MsoNormal><span lang=ES-MX style='font-family:"Antique Olive","sans-serif"'>Theresa M. Garcia, M.A.Ed.<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>'91 & '09<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>MEP Director<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>SDSU College of Engineering<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>5500 Campanile Drive<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>San Diego, CA� 92182-1303<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>619 594-5679 (voice)<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'>619 594-2108 (fax) <o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto'><span style='font-size:11.5pt;font-family:"Palatino Linotype","serif";color:black'>"Here is a test to find whether your mission on earth is finished : If you're alive, it isn't."  <i>� Illusions, Richard Bach</i><o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Antique Olive","sans-serif"'><o:p> </o:p></span></p><p class=MsoNormal><o:p> </o:p></p></div><br />-- 

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